Products

Rotary Sputtering Targets

Rotary Target Bonding
Indium or Tin is in the gap to increase thermal conductivity of rotary sputtering target.
• Backing Tube/ Indium Recycling.
• Ultrasonic Inspection of Bonding>98%.       
 

 ATO, SnO2-Sb2O3   

 

 
Rotary Target Extrusion
As the longer components, we through hot rolled or extrusion which is fine grain distribution with isotropic properties and heat treatment to uniform structure.
 
 

 

 Nb 

 
 

Rotary Target Sprayed

Vacuum plasma spray process will significant 
reduce air in the oxygen and nitrogen pollution. 
Here use a plasma generator as a thermal and 
kinetic energy source to spray-cast droplets of 
molten materials against an appropriate substrate. 
Inert gas is injected an arc chamber framed 
by two concentric water-cooled electrodes, 
ionizing the gas and creating high temperatures 
in most cases. The gas expands and rushes from 
the torch as an ionized "plasma". 
 
 

 Nb2Ox

 

TiOx

 
We are specialize in supply rotary targets for thin film deposition, ex. Cr and Cr alloy, Si and Si alloy, Nb2Ox, TiOx, Al2O3, Y2O3 and their compounds to customers.